The ingot cutting of mono-crystal silicon on plates and laser gettering impurity in semiconductors structures
COUNTRY OF ORIGIN
IDENTIFIER
TO3026PUBLISHED
2020-11-25LAST UPDATE
2020-11-26DEADLINE
Linked profile in other language
Responsible
Alesia Kartuzava
+375 29 150 2787
market@phti.by
+375 29 150 2787
market@phti.by
Description
Manufacturing of silicon plates for integrated microcircuits; removal fastdiffusing
impurity from active areas of Integrated microcircuits.
Field of application:
Microelectronics.
Developed tools:
The cutting tool and recommendations with the account crystallographic factors for
silicon plates of orientation (001) and (111)
on:
-mode of ingot cutting of monocrystal silicon on plates;
mode of laser getter I ng fast–diff using impurity.
impurity from active areas of Integrated microcircuits.
Field of application:
Microelectronics.
Developed tools:
The cutting tool and recommendations with the account crystallographic factors for
silicon plates of orientation (001) and (111)
on:
-mode of ingot cutting of monocrystal silicon on plates;
mode of laser getter I ng fast–diff using impurity.
Advantages and Innovations
-methods of cutting allow to receive more uniform distribution and considerable
decrease in depth of the broken layers to surfaces of cut off plates, to improve
geometrical parameters – to reduce a deflection and to eliminate a surface micro–wavlness;
-gettering methods of impurity allow to form gettering the high-capacity areas
excluding an exit of dispositions on a working surface of plates, to raise an exit of suitable semiconductor structures.
decrease in depth of the broken layers to surfaces of cut off plates, to improve
geometrical parameters – to reduce a deflection and to eliminate a surface micro–wavlness;
-gettering methods of impurity allow to form gettering the high-capacity areas
excluding an exit of dispositions on a working surface of plates, to raise an exit of suitable semiconductor structures.
Stage of development
Field tested/evaluated (TRL8)
Funding source
State budged
Internal
Internal
IPR status
Secret know-how
Sector group
Aeronautics, Space and Dual-Use Technologies
Environment
Maritime Industry and Services
Materials
Nano and micro technologies
Environment
Maritime Industry and Services
Materials
Nano and micro technologies
Organization information
Already engaged in transnational cooperation
Yes
Languages spoken
English
Russian
Russian
Information about partnership
Type of partnership considered
Commercial agreement with technical assistance
License agreement
License agreement
Type and size of partner sought
251-500
SME <= 10
SME 11-50
SME 51-250
SME <= 10
SME 11-50
SME 51-250
Attachments
Views: 2213
Statistics since 26.11.2020 17:07:24
Statistics since 26.11.2020 17:07:24